Our lab has state-of-the-art equipment for both device fabrication and atomic-scale imaging.

• 4 K 2 T UHV SPM system with multiple leads on both sample and probe sides
• UHV MBE set up for thin film growth of S, Se, and Te-based compounds and metal alloys
• Ambient stacking stage for fabricating layered 2D materials and devices
• Sputtering system for semiconductor deposition (shared)
• Thermal deposition chamber for metals (shared)
• Ambient Asylum MFP-3D AFM instrument (shared)
• Laser lithography tool (shared)
• Two reactive ion etching systems (shared)

Maxquantum also actively uses advanced characterization and nanofabrication tools in the CSU’s ARC facility.